2004' PASI on MEMS

Pan-American Advanced Studies Institutes
on Micro Electro Mechanical Systems

San Carlos de Bariloche, Patagonia, Argentina
21-30 de junio de 2004

Programa

21-26 de junio: Cursos breves, ponencias, posters
28-30 de junio: laboratorios

Temario

Sensores inerciales y de presión (micrófonos, acelerómetros, sensores ópticos de presión)

MEMS en Ciencias Básicas (fuerza de Casimir, fuerzas gravitatorias, detectores ultrasensibles)

MEMS ópticos (óptica adaptativa, comunicaciones, moduladores espaciales ópticos)

MEMS de RF  (conmutadores, inductores, telesensores, resonadores)

BioMEMS (sensores neurales, separadores de células, biomimética)

Microfluidica (microreactores, celdas de manipulación, microturbinas, control térmico)

Integración (monolitica, pre- y post-proceso, integración Flip Chip)

Fabricación (LIGA, Non-Si MEMS, Soft lithography)

Fiabilidad & Encapsulado

NEMS (nanoresonadores, excitaciones colectivas)

Cursos   

Tom Kenny (Stanford University)
MEMS devices for Force Sensing in Biology [1] [2]

Bob Sulouff (Analog Devices)
Surface Micromachining and Inertial Sensors
Design and development of accelerometers and gyros

Michael Cima (MIT)
Drug delivery: a case for implantable electronics

Todd Thorsen (MIT)
Multilayer soft lithography: Fabricating microfluidics devices for high-density biological assays [1] [2]

Jeff De Natale (Rockwell)
RF MEMS – Switches and Tunable Capacitors
RF MEMS – Circuits and applications

Keith Schwab (Maryland University)
Approaching the Quantum Limit of Nanomechanics
Beyond linear detection of motion: coupling Qubits to Nanomechanics

Massood Tabib-Azar (Case Western Reserve University)
Microactuators and Sensors for Microfluidics and Lab on a Chip applications [1] [2]

Olav Solgaard (Stanford University)
Grating Light Valve Technology – Principles and Applications
Diffractive Optical MEMS

Vladimir Aksyuk (Bell Labs, Lucent Technologies)
Optical MEMS: actuating light [1] [2]

John Rogers (Illinois University)
Pumped Microfluidics for Tunable Photonic Systems
Soft Lithographic Methods for Micro/Nanofabrication

Luiz Ferreira (UNICAMP, Brasil)
Deep Lithography for Microfabrication [1] [2]

Conferencias invitadas

Challenges with MEMS/NEMS technology development for Space applications at NASA/JPL
Thomas George (JPL- NASA)

Electroacoustic for MEMS-based microphone systems
Gary Elko (Avaya Labs)

Fabrications of MEMS devices: fundamentals and state-of-the-art
Bill Mansfield (NJNC)

Science and technology of ultrananocrystalline diamond films and applications to MEMS/NEMS multifunctional devices
Orlando Auciello (ANL)

MEMS activities in Argentina: the INTI experience
Daniel Lupi (INTI – Argentina)

Microdevices for biomolecular detection
Scott Manalis (MIT)

Single molecule detection using silicon nanotechnology
Greg Timp (UIUC)

MEMS for RF and Microwave Applications
Gabriel Rebeiz (University of Michigan)

Casimir Force Measurements with MEMS
Ho Bun Chan (Florida Univerisity)

Use of MEMS for detecting small forces: the search for corrections to Newtonian gravity
Ricardo Decca (Indiana University Purdue Univ. Indianapolis)

Microfluidics chips for integrated DNA Assays
Carlos Mastrangelo (Corning)

Bio-MEMS: reducing size and time. The example of the Salmonella testing probe
Flavio Aristone (CCET – UFMS, Brasil)

Actuation of MEMS devices using radiation pressure
Rafi Kleiman (Mc Master Univerisity – Canada)

MEMS microrelay on SOI technology
Alex Lozano (INTI - Argentina)

Non-Packaging applications of LTCC technology
Mário Gongora (IPT, Brasil)

MEMS and Integrated nanophotonics for sensor applications
Dustin Carr (Sandia National Labs)

Exploring the limits of optical lithography in MEMS and nano devices fabrication
Ray Cirelli (NJNC)

Micro Chemical Systems: New solutions to chemical engineering problems through miniaturization
Ronald Besser (Stevens Institute of Technology)

Toner-polyester and toner-glass: dry, fast, easy and inexpensive processes for fabrication of microfluidic devices
Claudimir Lucio Do Lago (Sao Pablo University, Brasil)

Recent progress in the mathematical analysis and numerical simulation of magnetic head sliders
Gustavo Buscaglia (CAB – Argentina)

Surface patterning of MEMS related materials
Omar Azzaroni (INIFTA, Argentina)

Microfluidics devices and microsystems: Technologies and perspectives
Eliphas Simoes (Univ. de São Pablo, Brasil)

Optical MEMS devices for Telecom systems
Flavio Pardo (Lucent Technologies)

Self-positioning micromachined structures made by Micro-origami
Pablo Vaccaro (ATR, Japan)

Silicon 3D patterning and applications
Cyro Ketzer Saul (Univ. Federal do Parana, Brasil

Micromachined gas sensor and integrated optical circuit
Alberto Lamagna (CNEA)

Packaging of MEMS: an experience on LTCC
Liliana Fraigi (INTI- Argentina)

The use of Molecular Simulations in the study of Micro/Nano Fluidics: A Case Study

German Drazer (The Benjamin Levich Institute)

Microsystems Technology Labs: a MEMS (and other devices) Fabrication Facility

Vicky Diadiuk (MTL - Massachusetts Institute of Technology)


Group picture


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